Combined on-axis and off-axis illumination

Details Combined on-axis and off-axis illumination Combined on-axis and off-axis illumination

2005-12-20

2005-12-20

McPherson, John A. (Department: 1756)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S492100, C250S492200, C250S492230, C430S005000, C355S067000

Reexamination Certificate

active

06977387

ABSTRACT:
The present invention describes an aperture comprising an opaque plate with a central opening and at least one peripheral opening and a method for combining an on-axis component and at least one off-axis component of illumination light.

REFERENCES:
patent: 593933 (1897-11-01), Elwood
patent: 3668404 (1972-06-01), Lehovec
patent: 4023904 (1977-05-01), Sheets
patent: 5822135 (1998-10-01), Lee et al.
patent: 6323500 (2001-11-01), Yamashita
patent: 6361909 (2002-03-01), Gau et al.

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