Combined interferometer/polarimeter

Details Combined interferometer/polarimeter Combined interferometer/polarimeter

1997-02-27

1998-07-07

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

057777403

ABSTRACT:
An apparatus and method for measuring the topographic profile of a reflective member having an index of refraction. The apparatus comprises a first optical system that reflects a light beam from the reflective member and detects the reflected light beam. A second optical system directs the light beam to interfere with the reflected light beam and detects the resulting interference pattern. A processor coupled to the first optical system and the second optical system computes the index of refraction of the reflective member from the detected reflected light beam and provides the topographic profile of the reflective member from the index of refraction and the interference pattern.

REFERENCES:
patent: 5583639 (1996-12-01), Rostvall
Journal of Modern Optics, 1991, vol. 38, No. 5, 889-896 (no date available) .

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