Combined high speed optical profilometer and ellipsometer

Details Combined high speed optical profilometer and ellipsometer Combined high speed optical profilometer and ellipsometer

2006-07-11

2006-07-11

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Plural test

Reexamination Certificate

active

07075630

ABSTRACT:
A system and method for measuring defects, film thickness, contamination, particles and height of a thin film disk or a silicon wafer.

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