Data processing: artificial intelligence – Knowledge processing system – Knowledge representation and reasoning technique
Reexamination Certificate
2011-05-31
2011-05-31
Holmes, Michael (Department: 2129)
Data processing: artificial intelligence
Knowledge processing system
Knowledge representation and reasoning technique
Reexamination Certificate
active
07953689
ABSTRACT:
Embodiments of the invention may be used to produce a data mining signal by generating hybrid dataset representing data related to tools used during a semiconductor fabrication process. By selectively combining similar processes, the data mining signal strength of each tool used to perform the steps of the fabrication process may be increased. A combined process variable may be used to represent the group of tools and processes, collectively. A set of rules may be composed to determine which processes used in the semiconductor fabrication process should be combined in the hybrid dataset.
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Holmes Michael
International Business Machines - Corporation
Nock James R.
Patterson & Sheridan LLP
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