Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1994-09-20
1996-02-06
Allen, Stephone B.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
250306, 359368, 73105, H01J 314, G01B 528
Patent
active
054897742
ABSTRACT:
A combined atomic force and near field microscope assembly for atomic level inspection of a target object. The assembly includes a scanning probe with a sharp tip and a photosensitive region on its lower surface. A sample is disposed on a glass substrate and exposed to an evanescent wave generated on the glass substrate by total internal reflection. An optical probe comprising a microfabricated cantilever having an apex in close proximity to a photosensitive region is disposed in close proximity to a sample. The photosensitive region collects light generated by FTR at the apex of the optical probe due to local disruptions of the evanescent field caused by the probe tip. A cantilever displacement mechanism is included so as to allow for operation in a second mode as a conventional atomic force microscope.
REFERENCES:
patent: 4941753 (1990-07-01), Wickramasinghe
patent: 5294804 (1994-03-01), Kojimura
patent: 5319960 (1994-06-01), Gamble et al.
patent: 5319977 (1994-06-01), Quate et al.
patent: 5381101 (1995-01-01), Bloom et al.
patent: 5406832 (1995-04-01), Gamble et al.
Akamine Shinya
Yamada Hirofumi
Allen Stephone B.
The Board of Trustees of the Leland Stanford University
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