Combined absolute-pressure and relative-pressure sensor

Details Combined absolute-pressure and relative-pressure sensor Combined absolute-pressure and relative-pressure sensor

2007-09-18

2007-09-18

Thompson, Jewel (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

11110103

ABSTRACT:
A micromechanical sensor for measuring at least a first pressure of a first medium, as well as a method for manufacturing such a micromechanical sensor. The micromechanical sensor has at least one substrate having at least two sensor elements, which are preferably made of a semiconductive material. The substrate has at least a first sensor element for measuring an absolute-pressure variable of the first medium and a second sensor element for measuring a relative-pressure variable of the first medium.

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