Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Quality evaluation
Reexamination Certificate
2008-04-23
2009-12-29
Nghiem, Michael P. (Department: 2863)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Quality evaluation
Reexamination Certificate
active
07640126
ABSTRACT:
An inspectional equation storage unit103for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit104for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit105for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit106for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit107for outputting the inspecting results.
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Ellis William T.
Foley & Lardner LLP
Khuu Cindy H
Nghiem Michael P.
OMRON Corporation
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