Combination wafer carrier and storage device

Details Combination wafer carrier and storage device Combination wafer carrier and storage device

1996-02-05

1997-08-19

Chin-Shue, Alvin C.

Supports: racks

Special article

Platelike

A47F 700

Patent

active

056578792

ABSTRACT:
A combination wafer carrier and basket-like storage device that includes insertable and removable plates for adjustment of capacity, as well as insertable and removable basket-like sleeves for adaptation to various-sized wafers.

REFERENCES:
patent: D338991 (1993-08-01), Naito et al.
patent: D344386 (1994-02-01), Ogino
patent: 4388140 (1983-06-01), Nakazato et al.
patent: 4743156 (1988-05-01), Raffay et al.
patent: 4872554 (1989-10-01), Quernemoen
patent: 4949848 (1990-08-01), Kos
patent: 4993559 (1991-02-01), Cota
patent: 5193682 (1993-03-01), Naito et al.
patent: 5228568 (1993-07-01), Ogino et al.
patent: 5390811 (1995-02-01), Ogino et al.

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