Optics: measuring and testing – Material strain analysis – With polarized light
Reexamination Certificate
2011-03-08
2011-03-08
Punnoose, Roy (Department: 2886)
Optics: measuring and testing
Material strain analysis
With polarized light
C356S369000
Reexamination Certificate
active
07903238
ABSTRACT:
A method includes selecting one of performing ellipsometry or performing optical stress generation and detection. The method also includes, in response to selecting performing ellipsometry, applying at least one first control signal to a controllable retarder that modifies at least polarization of a light beam, and performing ellipsometry using the modified light beam. The method further includes, in response to selecting performing optical stress generation and detection, applying at least one second control signal to the controllable retarder, and performing optical stress generation and detection using the modified light beam. Apparatus and computer readable media are also disclosed.
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Hou Yanwen
Kotelyanskii Michael J.
Mehendale Manjusha
Onderko Jim
Tas Guray
Harrington & Smith
Punnoose Roy
Rudolph Technologies, Inc.
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