Combination micromachine and optical device array

Details Combination micromachine and optical device array Combination micromachine and optical device array

2006-04-11

2006-04-11

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S224200, C359S292000

Reexamination Certificate

active

07027203

ABSTRACT:
A unit is made up of an electronic integrated circuit, a MEMS device, and an active optical device, electrically coupled to the electronic integrated circuit and located between the electronic integrated circuit and the MEMS device. Tthe MEMS device is electrically coupled to the electronic integrated circuit and positioned to affect the behavior of light, relative to the active optical device, based upon the position of an element in the MEMS device as controlled by the electronic integrated circuit.

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