Heating – Heating or heat retaining work chamber structure – Door – cover or port
Reexamination Certificate
2000-06-02
2001-07-10
Wilson, Gregory (Department: 3749)
Heating
Heating or heat retaining work chamber structure
Door, cover or port
C432S237000, C118S715000
Reexamination Certificate
active
06257881
ABSTRACT:
BACKGROUND OF THE INVENTION
The invention relates to a susceptor lid for use in a CVI/CVD furnace. More specifically, the invention is directed to a lid configured to consecutively run CVI/CVD and heat treatment processes without opening the furnace between the processes.
Refractory composites are commonly subjected to heat treatment and CVI/CVD processes. According to prior art processes, different susceptor lids are used for each specific process because a CVI/CVD susceptor lid is provided with holes to enable gas flow, while the heat treatment susceptor lid is imperforate in order to prevent radiative heat transfer through the lid. Changing the lids is both time consuming and results in loss of radiation heat from the furnace. Therefore, a lid that may be used for both processes without opening the furnace is desired.
SUMMARY OF THE INVENTION
According to an aspect of the invention, a combined heat treat and CVI/CVD susceptor lid for a furnace susceptor, which allows exhaust gas to exit therefrom, is disclosed. The susceptor lid comprises: a susceptor lid body having a gas exhaust hole. The susceptor lid body has a top surface and a bottom surface. An exhaust lid is disposed over the gas exhaust hole, with a clearance between the exhaust lid and the gas exhaust hole such that exhaust gas pressure within the clearance is approximately equal to, or less than the exhaust gas pressure within the gas exhaust hole. The exhaust lid is positioned to block the majority of the radiation from below the bottom surface of the susceptor lid body.
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Del Real Jose
Fiala Robert
Rudolph James W.
Welson Darren
Zeigler Dary
Leffel Kevin
Odar Helen A.
The B.F. Goodrich Company
Wilson Gregory
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