Combination CVI/CVD and heat treat susceptor lid

Details Combination CVI/CVD and heat treat susceptor lid Combination CVI/CVD and heat treat susceptor lid

1998-10-23

2000-05-16

Ferensic, Denise L.

Heating

Heating or heat retaining work chamber structure

Door, cover or port

432237, F27D 118

Patent

active

060628510

ABSTRACT:
The invention relates to a susceptor lid for use in a CVI/CVD furnace. More specifically, the invention is directed to a lid configured to consecutively run CVI/CVD and heat treatment processes without opening the furnace. The susceptor lid according to the invention comprises a susceptor lid body having a gas exhaust hole; and, an exhaust lid disposed over said gas exhaust hole, said exhaust lid being configured to move within the CVI/CVD furnace from a first position wherein said exhaust lid covers said gas exhaust hole to a second position wherein said gas exhaust lid at least partially uncovers said gas exhaust hole.

REFERENCES:
patent: 1933461 (1933-10-01), Toll
patent: 5377297 (1994-12-01), Nuutinen
patent: 5910006 (1999-06-01), Conroy et al.

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