Refrigeration – Low pressure cold trap process and apparatus
Patent
1997-03-25
1999-01-05
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
417901, B01D 800
Patent
active
058551182
ABSTRACT:
A combination cryopump/getter pump including a cryopump section having a cryopump inlet, a getter pump section having a getter pump inlet, and a mechanism for coupling the cryopump section and the getter pump section to a single port of a process chamber to be evacuated. Preferably, a cylindrical cryopump section surrounds a cylindrical getter pump section. Preferably, the cryopump section and the getter pump section are coupled to the common port of the process chamber by a gate valve mechanism. In one embodiment of the present invention, the gate valve mechanism isolates the cryopump inlet and the getter pump inlet when in a closed position, and in another embodiment of the present invention the gate valve does not isolate the cryopump inlet from the getter pump inlet when in a closed position. Preferably, thermal insulation is provided between the getter pump section and the cryopump section to thermally isolate the two sections. The cryopump section preferably includes both a 15.degree. K array and a 80.degree. K array.
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J. Briesacher et al., "Non-Evaporable Getter Pumps for Semiconductor Processing Equipment," Ultra Clean Technology, vol. 1, No. 1, pp. 49-57, 1990.
Capossela Ronald C.
SAES Pure Gas, Inc.
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