Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-09-13
2005-09-13
Dougherty, Thomas M. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Reexamination Certificate
active
06943483
ABSTRACT:
A piezoelectric actuator includes comb teeth-shaped piezoelectric actuators, each comprising plural piezoelectric layers. A side surface of each tooth is fired. Actuators are made by (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, and (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers can thereafter be fired.
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Kitamura Kazumasa
Takahashi Nobuo
Takeuchi Yukihisa
Tsuji Hiroyuki
Burr & Brown
Dougherty Thomas M.
NGK Insulators Ltd.
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