Comb sense microphone

Details Comb sense microphone Comb sense microphone

2005-08-05

2009-06-09

Ni, Suhan (Department: 2614)

Electrical audio signal processing systems and devices

Electro-acoustic audio transducer

Microphone capsule only

C381S190000, C381S430000

Reexamination Certificate

active

07545945

ABSTRACT:
There is provided a rigid hinged substrate, which forms a diaphragm for miniature microphones. A series of fingers disposed radially around the perimeter of the diaphragm interacts with mating fingers disposed adjacent the diaphragm with a small gap in between. The fingers are interdigitated. The movement of the diaphragm fingers relative to the fixed fingers varies the capacitance, thereby allowing creation of an electrical signal responsive to varying sound pressure at the diaphragm. Because the fingers may be formed with great stiffness, the classic problem in typical capacitive microphones of attraction of the diaphragm to the back plate is effectively overcome. The multiple fingers allow the creation of a microphone having a high output voltage relative to conventional microphones. This yields a very low noise microphone. The diaphragm may be readily formed using well known silicon microfabrication techniques so as to reduce manufacturing costs.

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