Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1992-04-07
1994-09-27
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
G01P 904
Patent
active
053498550
ABSTRACT:
A microfabricated tuning fork rate sensitive structure and drive electronics in which vibrational forces are communicated through a set of meshing drive and driven finger electrodes associated with each of two vibrating elements. The vibrating elements are supported in a rotatable assembly between first and second support electrodes which are in turn suspended by flexures for rotation about an axis passing through the flexures and through a point midway between the vibrating elements. Additional masses are formed onto the vibrating elements to improve overall sensor sensitivity. Sense electrodes for detecting capacitive changes between the support electrodes and the sense electrodes are positioned at each end of the support electrodes. Drive electronics are connected between the driven fingers of the vibrating elements and the drive electrode fingers which mesh with them to cause vibration. Excitation is provided between the support electrodes and the sense electrodes. Any change in signal resulting from rotation of the assembly and the resulting variation in capacitance between the support electrodes and the sense electrodes is sensed as a measure of inertial rate. A torque loop may be additionally formed using the sense electrodes in order to re-torque the assembly to a neutral position in a torque-to-balance loop.
REFERENCES:
patent: Re32931 (1989-05-01), Staudte
patent: Re33479 (1990-12-01), Juptner et al.
patent: 3053095 (1962-09-01), Koril et al.
patent: 3251231 (1966-05-01), Hunt et al.
patent: 3370458 (1968-02-01), Dillon
patent: 3696429 (1972-10-01), Tressa
patent: 3913035 (1975-10-01), Havens
patent: 4044305 (1977-08-01), Oberbeck
patent: 4122448 (1978-10-01), Martin
patent: 4144764 (1979-03-01), Hartzell, Jr.
patent: 4155257 (1979-05-01), Wittke
patent: 4234666 (1980-11-01), Gursky
patent: 4321500 (1982-03-01), Paros et al.
patent: 4336718 (1982-06-01), Washburn
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4406992 (1983-09-01), Kurtz et al.
patent: 4411741 (1983-10-01), Janata
patent: 4414852 (1983-11-01), McNeill
patent: 4447753 (1984-08-01), Ochiai
patent: 4468584 (1984-08-01), Nakamura et al.
patent: 4478076 (1984-10-01), Bohrer
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4484382 (1984-11-01), Kawashima
patent: 4490772 (1984-12-01), Blickstein
patent: 4495499 (1985-01-01), Richardson
patent: 4499778 (1985-02-01), Westhaver et al.
patent: 4502042 (1985-02-01), Wuhrl et al.
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4524619 (1985-06-01), Staudte
patent: 4538461 (1985-09-01), Juptner
patent: 4585083 (1986-04-01), Nishiguchi
patent: 4590801 (1986-05-01), Merhav
patent: 4592242 (1986-06-01), Kempas
patent: 4596158 (1986-06-01), Strugach
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4600934 (1986-07-01), Aine et al.
patent: 4619001 (1986-10-01), Kane
patent: 4621925 (1986-11-01), Masuda et al.
patent: 4628283 (1986-12-01), Reynolds
patent: 4629957 (1986-12-01), Walters et al.
patent: 4639690 (1987-01-01), Lewis
patent: 4644793 (1987-02-01), Church
patent: 4651564 (1987-03-01), Johnson et al.
patent: 4653326 (1987-03-01), Danel et al.
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4665605 (1987-05-01), Kempas
patent: 4670092 (1987-06-01), Motamedi
patent: 4671112 (1987-06-01), Kimura et al.
patent: 4674180 (1987-06-01), Zavracky et al.
patent: 4674319 (1987-06-01), Muller et al.
patent: 4674331 (1987-06-01), Watson
patent: 4679434 (1987-07-01), Stewart
patent: 4680606 (1987-07-01), Knutti et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4705659 (1987-11-01), Bernstein et al.
patent: 4706374 (1987-11-01), Murkami
patent: 4712439 (1987-12-01), North
patent: 4727752 (1988-03-01), Peters
patent: 4735506 (1988-04-01), Pavlath
patent: 4736629 (1988-04-01), Cole
patent: 4743789 (1988-05-01), Puskas
patent: 4744248 (1988-05-01), Stewart
patent: 4744249 (1988-05-01), Stewart
patent: 4747312 (1988-05-01), Herzl
patent: 4750364 (1988-07-01), Kawamura et al.
patent: 4761743 (1988-08-01), Wittke
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4776924 (1988-10-01), Delapierre
patent: 4783237 (1988-11-01), Aine et al.
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4792676 (1988-12-01), Hojo et al.
patent: 4805456 (1989-02-01), Howe et al.
patent: 4808948 (1989-02-01), Patel et al.
patent: 4834538 (1989-05-01), Heeks et al.
patent: 4851080 (1989-07-01), Howe et al.
patent: 4855544 (1989-08-01), Glenn
patent: 4869107 (1989-09-01), Murakami
patent: 4882933 (1989-11-01), Petersen et al.
patent: 4884446 (1989-12-01), Ljung
patent: 4890812 (1990-01-01), Chechile et al.
patent: 4893509 (1990-01-01), MacIver et al.
patent: 4898032 (1990-02-01), Voles
patent: 4899587 (1990-02-01), Staudte
patent: 4900971 (1990-02-01), Kawashima
patent: 4901586 (1990-02-01), Blake et al.
patent: 4916520 (1990-04-01), Kurashima
patent: 4922756 (1990-05-01), Henrion
patent: 4929860 (1990-05-01), Hulsing, II et al.
patent: 4981359 (1991-01-01), Tazartes et al.
patent: 5001383 (1991-03-01), Kawashima
patent: 5016072 (1991-05-01), Greiff
patent: 5025346 (1991-06-01), Tang et al.
patent: 5038613 (1991-08-01), Takenaka et al.
patent: 5090809 (1992-02-01), Ferrar
patent: 5094537 (1992-03-01), Karpinski, Jr.
patent: 5138883 (1992-08-01), Paquet et al.
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5226321 (1993-07-01), Varnham et al.
patent: 5233874 (1993-08-01), Putty et al.
patent: 5241861 (1993-09-01), Hulsing, II
Barth, P. W. et al.,"A Monolithic Silicon Accelerometer With Integral Air Damping and Overrange Protection," 1988 IEEE, pp. 35-38.
Boxenhorn, B., et al., "An electrostatically Rebalanced Micromechanical Accelerometer," AIAA Guidance, Navigation and Control Conference, Boston, Aug. 14-16, 1989, pp. 118-122.
Boxenhorn, B., et al., "Micromechanical Inertial Guidance System and its Application," Fourteenth Biennial Guidance Test Symposium, vol. 1, Oct. 3-5, 1989, pp. 113-131.
Boxenhorn, B., et al., "Monolithic Silicon Accelerometer," Transducers '89, Jun. 25-30, 1989, p. 273-277.
Boxenhorn, B., et al., "A Vibratory Micromechanical Gyroscope," AIAA Guidance, Navigation and Control Conference, Minneapolis, Aug. 15-17, 1988, pp. 1033-1040.
Howe, R., et al., "Silicon Micromechanics: Sensors and Actuators On a Chip," IEEE Spectrum, Jul. 1990, pp. 29-35.
Moskalik, L., "Tensometric Accelerometers with Overload Protection," Meas. Tech. (USA), vol. 22, No. 12, Dec. 1979 (publ. May 1980, pp. 1469-1471.
Nakamura, M., et al.,"Novel Electrochemical Micro-Machining and Its Application for Semiconductor Acceleration Sensor IC," Digest of Technical Papers (1987) Institute of Electrical Engineers of Japan, pp. 112-115.
Petersen, K. E., et al., "Micromechanical Accelerometer Integrated with MOS Detection Circuitry," IEEE, vol. ED-29, No. 1 (Jan. 1982), pp. 23-27.
Petersen, Kurt E., et al., "Silicon as a Mechanical Material," Proceedings of the IEEE, vol. 70, No. 5, May 1982, pp. 420-457.
"Quartz Rate Sensor Replaces Gyros," Defense Eelctronics, Nov. 1984, p. 177.
Rosen, Jerome, "Machining In the Micro Domain," Mechanical Engineering, Mar. 1989, pp. 40-46.
Teknekron Sensor Development Corporation article entitled "Micro-Vibratory Rate Sensor," 2 pages, 1080 Marsh Road, Menlo Park, Calif. 94025.
Bernstein Jonathan J.
Weinberg Marc S.
Chapman John E.
The Charles Stark Draper Laboratory Inc.
LandOfFree
Comb drive micromechanical tuning fork gyro does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Comb drive micromechanical tuning fork gyro, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Comb drive micromechanical tuning fork gyro will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1259141