Optical: systems and elements – Light interference – Produced by coating or lamina
Patent
1994-06-03
1996-03-26
Lerner, Martin
Optical: systems and elements
Light interference
Produced by coating or lamina
359588, 359586, 359890, G02B 528, G02B 110, G02B 522
Patent
active
055025951
ABSTRACT:
A color filter comprising a transparent substrate and two or more multilayer films of amorphous silicon materials deposited on said substrate, each film being different, each layer of said two or more multi-layer films having a thickness less than the wavelength of the visible light and at least three layers of said two or more multi-layer films of amorphous silicon materials in an alternate arrangement wherein the amorphous silicon materials are selected from a-SiOx and a-SiNx is described. A method of preparing the color filter comprising depositing on the substrate by PECVD method two or more multilayer films is also described. The color filters prepared by PECVD method have a more compact texture and a better environmental resistant. The PECVD method for the preparation of the filters is more efficient than conventional methods.
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Fang Yean-Kuen
Ho Fang-Chuan
Kuo Lee-Ching
Lee William
Chang Audrey
Industrial Technology Research Institute
Lerner Martin
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