Color filter process

Details Color filter process Color filter process

2004-11-30

2008-10-21

McPherson, John A. (Department: 1795)

Coating processes

Optical element produced

C427S164000, C427S264000

Reexamination Certificate

active

07438947

ABSTRACT:
A process for fabricating a color filter. An imprint mask accompanied by a dry etching step is used to replace the conventional wet development process. The present invention attains the advantages of increased pattern uniformity of color elements, improved film flatness of color elements, increased resolution, reduced process time, reduced process cost, and elimination of the use of developing solvent to reduce waste treatment and environmental impact.

REFERENCES:
patent: 2004/0229140 (2004-11-01), Kim
patent: 2004/0266307 (2004-12-01), McCoy et al.
patent: 5-066306 (1993-03-01), None

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