Color filter manufacturing method capable of assuring a high ali

Details Color filter manufacturing method capable of assuring a high ali Color filter manufacturing method capable of assuring a high ali

1999-01-22

2000-10-24

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Screen other than for cathode-ray tube

430 22, G02B 520, G02F 11335

Patent

active

061364819

ABSTRACT:
A red filter and a red alignment mark are simultaneously formed by performing alignment of a photomask for exposure with a groundwork alignment mark. When forming a blue filter, a blue filter pattern is formed from a blue resist by performing alignment of a photomask with the red alignment mark by using a red alignment light. Intensities of reflection lights concerning the red alignment mark are increased by using the red alignment mark that does not absorb the red alignment light when forming the blue filter, so that a high contrast of the red alignment mark is obtained.

REFERENCES:
patent: 5935741 (1999-08-01), Kim et al.

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