Colloidal silica polishing abrasive

Abrading – Abrading process – Utilizing fluent abradant

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216 89, 252 791, 428404, 438690, 438693, 451 41, B24B 100, H01L 2100

Patent

active

061590770

ABSTRACT:
This colloidal silica soot is a byproduct of chemical vapor deposition processing of fused silica or ultra low expansion glasses in the finishing industry. The colloidal silica by product is referred to as "soot". Retaining the same physical properties as the parent glass and having a spherical morphology, the colloidal silica soot is an ideal candidate for polishing applications. The soot has a large particle size when compared to conventional colloidal or fumed silica. As a result, the large size produces less surface damage and allows for a higher (faster) removal rate. The large particle size also results in super polished surfaces.

REFERENCES:
patent: 5266088 (1993-11-01), Sandusky et al.
patent: 5605490 (1997-02-01), Laffey et al.
patent: 5997620 (1999-12-01), Kodama et al.
patent: 6043159 (2000-03-01), Jacquinot et al.

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