Collector for EUV light source

Details Collector for EUV light source Collector for EUV light source

2007-10-30

2007-10-30

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S505100

Reexamination Certificate

active

11603471

ABSTRACT:
An apparatus/method is disclosed that may comprise an EUV light source which may comprise a collector which may comprise an elliptical collector mirror having a first focus at a plasma initiation point and a second focus at an intermediate focus of the EUV light source; a debris shield intermediate the plasma initiation point and the elliptical collector mirror comprising a plurality of radially extending channels extending from the first focus and aligned to the second focus and in symmetry about an axis of rotation passing through the first focus and aligned to a longitudinal axis of the elliptical collector mirror. The plurality of channels may be formed between a plurality of generally planer foils extending radially from the first focus and aligned to the second focus and in symmetry about an axis of rotation passing through the first focus and aligned to a longitudinal axis of the collector mirror.

REFERENCES:
patent: 7087914 (2006-08-01), Akins et al.

Affiliated with

Also associated with

Rating

Collector for EUV light source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Collector for EUV light source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Collector for EUV light source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3868082