Collector for EUV light source

Details Collector for EUV light source Collector for EUV light source

2007-12-18

2007-12-18

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S505100

Reexamination Certificate

active

11603732

ABSTRACT:
An apparatus/method may comprise, a multi-layer reflecting coating forming an EUV reflective surface which may comprise an inter-diffusion barrier layer which may comprise a carbide selected from the group ZrC and NbC or a boride selected from the group ZrB2and NbB2or a disilicide selected from the group ZrSi2and NbSi2or a nitride selected from the group BN, ZrN, NbN, BN, ScN and Si3N4. The apparatus and method may comprise an EUV light source collector which may comprise a collecting mirror which may comprise a normal angle of incidence multi-layer reflecting coating; an inter-diffusion barrier layer comprising a material selected from the group comprising a carbide selected from the group ZrC and NbC, or a boride selected from the group ZrB2and NbB2or a disilicide selected from the group ZrSi2and NbSi2a nitride selected from the group BN, ZrN, NbN, BN, ScN and Si3N4.

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