Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2007-05-15
2007-05-15
Nguyen, Kiet T. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
Reexamination Certificate
active
10798740
ABSTRACT:
A method and apparatus for debris removal from a reflecting surface of an EUV collector in an EUV light source is disclosed which may comprise the reflecting surface comprises a first material and the debris comprises a second material and/or compounds of the second material, the system and method may comprise a controlled sputtering ion source which may comprise a gas comprising the atoms of the sputtering ion material; and a stimulating mechanism exciting the atoms of the sputtering ion material into an ionized state, the ionized state being selected to have a distribution around a selected energy peak that has a high probability of sputtering the second material and a very low probability of sputtering the first material. The stimulating mechanism may comprise an RF or microwave induction mechanism.
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Algots John Martin
Blumenstock Gerry M.
Bowering Norbert
Ershov Alexander I.
Fomenkov Igor V.
Cray William
Cymer Inc.
Nguyen Kiet T.
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