Collecting unit for semiconductor process

Details Collecting unit for semiconductor process Collecting unit for semiconductor process

2007-10-05

2010-06-01

Marcheschi, Michael A (Department: 1797)

Gas separation

Combined or convertible

C055S434200, C055S434400, C055S443000, C055S462000, C055S465000, C055SDIG015, C095S288000, C118S715000, C438S905000

Reexamination Certificate

active

07727296

ABSTRACT:
A collecting unit is disposed on an exhaust passage of a semiconductor processing apparatus to collect by-products contained in an exhaust gas. The collecting unit includes a trap body detachably disposed inside a casing and configured to collect a part of the by-products. The trap body includes fins arrayed in a flow direction of the exhaust gas and having a surface on which a part of the by-products is deposited and trapped. The collecting unit further includes a receiving mechanism disposed inside the casing and configured to receive a part of the by-products that peels off from the trap body or an inner surface of the casing to prevent this part from being deposited on a bottom of the casing. The receiving mechanism is configured to allow a part of the by-products held thereon to be in contact with a cleaning gas from above and from below.

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Machine Translation of the Detailed Description of JP 2004-343095, published Dec. 2, 2004.

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