Collation method of stocker storage in semiconductor wafer casse

Details Collation method of stocker storage in semiconductor wafer casse Collation method of stocker storage in semiconductor wafer casse

1998-03-06

2000-11-21

Terrell, William E.

Data processing: generic control systems or specific application

Specific application, apparatus or process

Article handling

G06F 700

Patent

active

061515337

ABSTRACT:
According to a collation method of stocker storage in a semiconductor wafer cassette transportation apparatus having high semiconductor wafer cassette transportation ability, a host computer responds to an instruction from an operator to interrogate a stocker controller about storage of a semiconductor wafer cassette in a stocker. The stocker controller receiving the interrogation reports storage of a semiconductor wafer cassette in a stocker to the host computer. When the storage information retained by the host computer differs from the storage information reported from the stocker controller, the host computer provides a display of the discrepancy in storage information on an operator's terminal.

REFERENCES:
patent: 4974166 (1990-11-01), Maney et al.
patent: 5582497 (1996-12-01), Noguchi
patent: 5757650 (1998-05-01), Yamashita et al.
DE-Z: Deutsche Hebe-und Fordertechnik, 1986, Issue 12, pp. 19-26.

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