Metal working – Method of mechanical manufacture – Disassembling
Reexamination Certificate
2005-02-08
2005-02-08
Bryant, David P. (Department: 3726)
Metal working
Method of mechanical manufacture
Disassembling
C029S402030, C029S402080, C029S256000, C029S266000, C269S167000, C269S218000, C269S238000
Reexamination Certificate
active
06851168
ABSTRACT:
A clamp for quickly, effectively and safely removing a cathode collar from an HDP deposition chamber for routine maintenance, cleaning or replacement of the collar. The clamp includes a pair of clamp plates which are capable of pivoting movement on respective ends of a connecting rod. A clamp shoe for gripping a corresponding edge of the annular collar is provided on the bottom end of each clamp plate, and a turnbuckle is fitted with a pair of threaded shafts which engage the upper end portions of the respective clamp plates. By rotating the turnbuckle, the threaded shafts are advanced away from each other against the clamp plates, which pivot on the connecting rod and cause the clamp shoes to tightly engage respective edges of the collar. The clamp is grasped to lift the collar from the chamber and replace the collar in the chamber after cleaning or maintenance.
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Chang Wen-Shan
Chen Jung-Chang
Chen Kuo-Chuan
Chen Ming-Te
Chou Da-Hsiang
Bryant David P.
Taiwan Semiconductor Manufacturing Co. Ltd
Tung & Associates
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