Collapsing zipper varactor with inter-digit actuation...

Details Collapsing zipper varactor with inter-digit actuation... Collapsing zipper varactor with inter-digit actuation...

2008-01-15

2008-01-15

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S278000, C361S287000, C361S290000, C361S292000

Reexamination Certificate

active

07319580

ABSTRACT:
According to one embodiment a microelectromechanical (MEMS) switch is disclosed. The MEMS switch includes a substrate, a plurality of actuation electrodes mounted on the substrate, a plurality of bottom electrodes mounted on the substrate, a capacitor having subcomponents mounted on the two or more bottom electrodes and a top bendable electrode mounted on the substrate. The top electrode collapses a first magnitude towards the actuation electrodes whenever a first voltage is applied to one or more of the actuation electrodes and collapses a second magnitude towards the actuation electrodes whenever a second voltage is applied to the actuation electrodes.

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patent: WO 2005/104158 (2005-11-01), None
PCT Search Report, PCT/US2006/011134, mailed Jul. 24, 2006.

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