Cold trap for CVD furnace

Details Cold trap for CVD furnace Cold trap for CVD furnace

2005-06-21

2005-06-21

Lawrence, Frank M. (Department: 1724)

Gas separation: processes

Heat exchanging

Condensing to solid

C055S392100, C055S434200, C055S482100, C055SDIG001

Reexamination Certificate

active

06908499

ABSTRACT:
A cold trap having improved trapping efficiency for particles, particularly ammonium chloride fine powder particles. The cold trap has a dual-stage design, including an upstream stage fitted with at least one trap plate and a downstream stage fitted with a typically cup- or cone-shaped trap core in which is provided a conically-spiraled water cooling coil. A decreasing temperature gradient is provided along the length of the cold trap, such that exhaust gases flowing through the cold trap are gradually cooled and ammonium chloride or other particles which form from the gas are trapped by the trap plate or plates and collect in the trap core. The exhaust gases exiting the downstream end of the trap core are substantially or completely devoid of particles.

REFERENCES:
patent: 5820641 (1998-10-01), Gu et al.
patent: 6066209 (2000-05-01), Sajoto et al.
patent: 6107198 (2000-08-01), Lin et al.
patent: 6206971 (2001-03-01), Umotoy et al.
patent: 6286321 (2001-09-01), Glater
patent: 6319299 (2001-11-01), Shih et al.
patent: 6528420 (2003-03-01), Tong et al.
patent: 02061067 (1990-03-01), None

Affiliated with

Also associated with

Rating

Cold trap for CVD furnace does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Cold trap for CVD furnace, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Cold trap for CVD furnace will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3484622