Cold trap and cold trap regeneration method

Details Cold trap and cold trap regeneration method Cold trap and cold trap regeneration method

2011-08-09

2011-08-09

Jiang, Chen-Wen (Department: 3784)

Refrigeration

Low pressure cold trap process and apparatus

C417S901000

Reexamination Certificate

active

07992394

ABSTRACT:
A cold trap is provided with a cold panel provided in a pumping path such that the panel is exposed, a refrigerator thermally coupled to the cold panel and operative to cool the cold panel; and a controller configured, in a regeneration process for evaporating a gas frozen on the surface of the cold panel and discharging the gas outside using the vacuum pump, to control the refrigerator so as to raise the temperature of the cold panel to a temperature exceeding a non-liquefaction temperature range and to adjust a pressure in the pumping path at the temperature so that the gas frozen on the surface of the cold panel is evaporated without being melted, the non-liquefaction temperature range being a range in which it is guaranteed that a gas frozen on the surface of the cold trap is evaporated without being melted.

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JP OA, App. No. 2008-116425, Apr. 14, 2011 (4 pages); Engl translation (3 pages).
Office Action citing the Notification of Reasons for Refusal from Japan Patent Office (w/English translation) for application No. 2008-116425 mailed Apr. 20, 2010.

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