Cold shield for a scanned linear IR detector array

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

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Details

250332, 25037015, H01L 31024

Patent

active

052586219

ABSTRACT:
An improved cold shielding arrangement for a scanned linear IR detector array normally having the pixels arranged in plural columns, is disclosed. The arrangement consists of a first slotted cold shield plate spaced from the array and designed to reduce the angular field of view for all pixels of the array in the scanning direction, and a composite cold shield in proximity to the individual pixels. The first part of the composite cold shield is a thicker plate, typically several mils thick having slots oriented to reduce the angular field of view in the resolution direction for the pixels in a common row. The second part of the composite cold shield is a thinner, top plate providing small apertures which further define the angular field of view in the resolution direction, and in certain cases also define the angular field of view in the scanning direction The first part of the composite cold shield may be fabricated of oriented silicon which may be preferentially etched to form small slots with vertical walls, while the second part of the composite cold shield may also be of silicon (typically 1 mil thick) with an opaque coating with photolithographically patterned apertures in a low reflectance, optically black film.

REFERENCES:
patent: 4431918 (1984-02-01), White
patent: 4914299 (1990-04-01), Jungkman et al.
patent: 5075553 (1991-12-01), Noble et al.

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