Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1977-12-12
1980-02-12
Esposito, Michael F.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
204169, 204170, 427 41, 428422, B05D 306
Patent
active
041884264
ABSTRACT:
The surfaces of organic and inorganic substrates, such as polyethylene film and metals, respectively, can be modified by cold plasma deposition of difluorocarbene or trifluoromethyl radical specie generated by subjecting precursor vapor, for example, perfluorocyclobutane or hexafluoroethane, to a radio frequency electrical glow discharge.
REFERENCES:
patent: 3415683 (1968-12-01), Coffman et al.
patent: 3518108 (1970-06-01), Heiss, Jr. et al.
patent: 3663265 (1972-05-01), Lee et al.
patent: 3676350 (1972-07-01), Wright et al.
patent: 3776762 (1973-12-01), Bernath
patent: 3940506 (1976-02-01), Heinecke
patent: 4038439 (1977-07-01), Gibson et al.
IBM Technical Disclosure Bulletin, vol. 19, No. 4, Sep. 1976, p. 1400.
Esposito Michael F.
Gazewood John A.
Lord Corporation
Page Thurman K.
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