Cold-cathode ionization manometer having a longer service...

Details Cold-cathode ionization manometer having a longer service... Cold-cathode ionization manometer having a longer service...

2007-02-06

2007-02-06

Hirshfeld, Andrew H. (Department: 2858)

Electricity: measuring and testing

Using ionization effects

For monitoring pressure

C324S463000

Reexamination Certificate

active

10528600

ABSTRACT:
A cold cathode ionization manometer operating according to the inverse magnetron principle to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10−2Pa and 1 Pa). To reduce the contamination and thus to extend the service life the measuring tube is provided with two separately controlled and axially displaced cathodes and a coaxially arranged common anode within a vacuum-proof housing.

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