Cold cathode electron source

Details Cold cathode electron source Cold cathode electron source

2005-04-19

2005-04-19

Patel, Vip (Department: 2879)

Electric lamp and discharge devices

With luminescent solid or liquid material

Vacuum-type tube

C313S309000, C313S351000, C313S336000, C313S497000

Reexamination Certificate

active

06882098

ABSTRACT:
The present invention provides a cold cathode electron source and a method for manufacturing the cold cathode electron source. The cold cathode electron source includes a substrate on which are deposited a catalyst metal layer, an insulation layer, and a gate metal layer; a cavity section formed through the catalyst metal layer, the insulation layer, and the gate metal layer; and an emitter realized through a plurality of carbon nanotubes, which are grown from walls of the catalyst metal layer exposed in the cavity section and which have long axes parallel to the substrate. The method includes depositing a catalyst metal layer, an insulation layer, and a gate metal layer on a substrate; forming a cavity section by removing a portion of the gate metal layer, the insulation layer, and the catalyst metal layer using a photolithography process; and forming an emitter by mounting the substrate on a chemical vapor deposition reactor and growing carbon nanotubes in a low temperature atmosphere of 500˜800 degrees Celsius (° C.).

REFERENCES:
patent: 5066883 (1991-11-01), Yoshioka et al.
patent: 6062931 (2000-05-01), Chuang et al.
patent: 6135839 (2000-10-01), Iwase et al.
patent: 6232706 (2001-05-01), Dai et al.
patent: 6541906 (2003-04-01), Lee et al.
patent: 6605894 (2003-08-01), Choi et al.
patent: 20020060516 (2002-05-01), Kawate et al.
patent: 1 129 990 (2001-09-01), None
patent: 1020020003782 (2002-01-01), None
patent: 1020020007626 (2002-01-01), None

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