Cold-cathode-based ion source element

Details Cold-cathode-based ion source element Cold-cathode-based ion source element

2007-10-23

2009-10-20

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S42300F, C250S426000, C315S111810, C315S111910

Reexamination Certificate

active

07605379

ABSTRACT:
An ion source element includes a cold cathode, a grid electrode, and an ion accelerator. The cold cathode, the grid electrode, and the ion accelerator are arranged in that order and are electrically separated from one another. A space between the cold cathode and the grid electrode is essentially smaller than a mean free path of electrons at an operating pressure. The ion source element is thus stable and suitable for various applications.

REFERENCES:
patent: 4737688 (1988-04-01), Collins et al.
patent: 6139760 (2000-10-01), Shim et al.
patent: 7332714 (2008-02-01), Watanabe et al.
patent: 2006/0202701 (2006-09-01), Knapp et al.
patent: 2007/0051965 (2007-03-01), Du et al.
patent: 1670886 (2005-09-01), None

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