Coil conductor structure in thin-film magnetic head

Dynamic magnetic information storage or retrieval – Head – Core

Patent

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Details

360123, G11B 517, G11B 531

Patent

active

047033835

ABSTRACT:
A thin-film magnetic film composed of a substrate, a lower magnetic layer, a first insulating layer, a coil conductor, a second insulating layer, and an upper magnetic layer accumulated in this order. The cross-section of the coil conductor has a trapezoidal shape having skirts at the lower end of the sides thereof. Owing to the presence of the skirts, the surface of the second insulating layer formed thereon can be made flat by ion etching, and consequently the surface of the upper magntic layer is made flat. The incident angle of the ion beam and the thickness of the photoresist used in the ion etching process to make the pattern of the coil conductor layer are determined so that the cross-sectional shape of the coil conductor is a trapezoid having skirts at the lower ends thereof.

REFERENCES:
patent: 4416056 (1983-11-01), Takahashi

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