Optical waveguides – Optical fiber waveguide with cladding – Utilizing nonsolid core or cladding
Reexamination Certificate
2007-11-13
2007-11-13
Healy, Brian (Department: 2883)
Optical waveguides
Optical fiber waveguide with cladding
Utilizing nonsolid core or cladding
C385S122000, C385S123000, C385S126000, C359S285000, C359S342000, C359S334000
Reexamination Certificate
active
11061150
ABSTRACT:
An apparatus for inspecting a specimen, such as a semiconductor wafer, is provided. The apparatus comprises a laser energy source, such as a deep ultraviolet (DUV) energy source and an optical fiber arrangement. The optical fiber arrangement comprises a core surrounded by a plurality of optical fibers structures used to frequency broaden energy received from the laser energy source into frequency broadened radiation. The frequency broadened radiation is employed as an illumination source for inspecting the specimen. In one aspect, the apparatus comprises a central core and a plurality of structures generally surrounding the central core, the plurality of fibers surround a hollow core fiber filled with a gas at high pressure, a tapered photonic fiber, and/or a spider web photonic crystalline fiber, configured to receive light energy and produce frequency broadened radiation for inspecting the specimen.
REFERENCES:
patent: H15 (1986-01-01), Chraplyvy
patent: 6496634 (2002-12-01), Levenson
patent: 6822978 (2004-11-01), Kafka et al.
patent: 6845204 (2005-01-01), Broeng et al.
patent: 6944382 (2005-09-01), Berkey et al.
patent: 7006221 (2006-02-01), Wolf et al.
patent: 2004/0258381 (2004-12-01), Borrelli et al.
patent: 2005/0276556 (2005-12-01), Williams et al.
Benabid et al. “Stimulated Raman Scattering in Hydrogen-Filled Hollow Core Photonic Crystal Fiber”, Oct. 11, 2002, Science, vol. 298. pp. 399-402.
F. Benabid, et al., “Ultrahigh Efficiency Laser Wavelength Conversion in a Gas-Filled Hollow Core Photonic Crystal Fiber by Pure Stimulated Rotational Raman Scattering in Molecular Hydrogen,” Physical Review Letters, vol. 93, No. 12, Sep. 17, 2004.
F. Benabid, et al., “Stimulated Raman Scattering in Hydrogen-Filled Hollow-Core Photonic Crystal Fiber,” Science, vol. 298, Oct. 11, 2002, pp. 399-402.
K. Saitoh, et al., “Leakage loss and group velocity dispersion in air-core photonic bandgap fibers,” Optics Express, vol. 11, No. 23, 3100, Nov. 17, 2003.
J.C. Knight, et al., “Photonic Band Gap Guidance in Optical Fibers,” SCIENCE, Nov. 20, 1998, vol. 282, pp. 1476-1478.
M. Huebner, et al., “Fiber-Optic Systems in the UV-Region,”Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II, Proceedings of SPIE vol. 3911 (2000), pp. 303-312.
K.F. Klein, et al., “UV-Fibers for Applications Below 200 NM,”Optical Fibers and Sensors for Medical Applications, Proceedings of SPIE vol. 4253 © 2001 SPIE, pp. 42-49.
Ilko K. Ilev, et al., “Ultraviolet Broadband (190-450 nm) Nonlinear Frequency Conversion in Optical Fibers for Biomedical Use,”US Food and Drug Administration, Center for Devices and Radiological Health, HFZ-134, Rockville, MD 20857, © 2001 IEEE.
S.O. Konorov, et al., “Hollow-core photonic-crystal fibers optimized for four-wave mixing and coherent anti-Stokes Raman scattering,”Journal of Raman Spectroscopy,J.Raman Spectrosc. 2003; 34: 688-692.
Liu Xiaoxia, et al., “Study of Silver Film Inside Silica Capillary,” International Symposium on Photonic Glass (ISPG 2002), SPIE vol. 5061 © 2003 SPIE, pp. 254-258.
Anderson Guy G
Healy Brian
Smyrski Law Group, A P.C.
LandOfFree
Coherent DUV illumination for semiconductor wafer inspection does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Coherent DUV illumination for semiconductor wafer inspection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Coherent DUV illumination for semiconductor wafer inspection will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3809595