Coherence delay augmented laser beam homogenizer

Details Coherence delay augmented laser beam homogenizer Coherence delay augmented laser beam homogenizer

1991-11-27

1993-06-29

Epps, Georgia Y.

Optical waveguides

Noncyclindrical or nonplanar shaped waveguide

372 9, 372 93, 372 99, 372107, G02B 600

Patent

active

052242005

ABSTRACT:
The geometrical restrictions on a laser beam homogenizer are relaxed by ug a coherence delay line to separate a coherent input beam into several components each having a path length difference equal to a multiple of the coherence length with respect to the other components. The components recombine incoherently at the output of the homogenizer, and the resultant beam has a more uniform spatial intensity suitable for microlithography and laser pantogography. Also disclosed is a variable aperture homogenizer, and a liquid filled homogenizer.

REFERENCES:
patent: 4521075 (1985-06-01), Obenschain et al.
patent: 4744615 (1988-05-01), Fan et al.

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