(CoFe)Zr/Nb/Ta/Hf based target material

Details (CoFe)Zr/Nb/Ta/Hf based target material (CoFe)Zr/Nb/Ta/Hf based target material

2007-11-16

2011-11-29

Sheehan, John (Department: 1736)

Metal treatment

Stock

Magnetic

C148S313000, C148S311000, C204S298130

Reexamination Certificate

active

08066825

ABSTRACT:
A (CoFe)Zr/Nb/Ta/Hf based target material is provided which is capable of achieving a high sputtering efficiency and a high sputtering effect by increasing the leakage magnetic flux in the magnetron sputtering, and a method for producing the target material. This target material is made of an Fe—Co based alloy comprising not less than 80 atomic % in total of Fe and Co having an Fe:Co atomic ratio of 80:20 to 0:100, and less than 20 atomic % of one or more selected from the group consisting of Zr, Hf, Nb and Ta. The Fe—Co based alloy comprises a Co—Fe phase being a ferromagnetic phase, and the one or more selected from the group consisting of Zr, Hf, Nb and Ta are incorporated in solid solution form into the Co—Fe phase in a total amount of 0.5 to 2 atomic %.

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