Wave transmission lines and networks – Long lines – Shielded type
Reexamination Certificate
2006-03-14
2006-03-14
Lee, Benny T. (Department: 2817)
Wave transmission lines and networks
Long lines
Shielded type
C029S828000
Reexamination Certificate
active
07012489
ABSTRACT:
Provided are coaxial waveguide microstructures. The microstructures include a substrate and a coaxial waveguide disposed above the substrate. The coaxial waveguide includes: a center conductor; an outer conductor including one or more walls, spaced apart from and disposed around the center conductor; one or more dielectric support members for supporting the center conductor in contact with the center conductor and enclosed within the outer conductor; and a core volume between the center conductor and the outer conductor, wherein the core volume is under vacuum or in a gas state. Also provided are methods of forming coaxial waveguide microstructures by a sequential build process and hermetic packages which include a coaxial waveguide microstructure.
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Fisher John J.
Sherrer David W.
Baskin Jonathan D.
Lee Benny T.
Rohm and Haas Electronic Materials LLC
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