Coaxial liquid cooling of high power microwave excited plasma UV

Electric lamp and discharge devices: systems – Combined load device or load device temperature modifying... – Distributed parameter resonator-type magnetron

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313 22, 313 36, H01J 746

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active

050085930

ABSTRACT:
In a high power microwave excited plasma system including a microwave energy source operatively coupled to a plasma tube for generating a plasma within the tube, a gaseous medium within the tube for supporting a plasma and a reflector for focusing radiation emitted from the tube, an improved cooling system for the tube is provided which comprises a jacket surrounding the tube and defining a passageway therearound, a source of liquid dimethyl polysiloxane, and a circulator for conducting the liquid dimethyl polysiloxane through the passageway in heat exchange relationship with the tube.

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