Coating unit

Details Coating unit Coating unit

1998-07-21

2000-09-05

Edwards, Laura

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to attribute, absence or presence of work

118 52, 118313, 118319, 118320, B05C 702

Patent

active

061136956

ABSTRACT:
In a coating unit, a piezovalve driven by piezoelectric elements is used as an opening and closing valve 79. The use of the piezovalve which can nearly disregard delay time makes it possible to accurately control the time of working the opening and closing valve 79 and to finely control working speed thereof at the time of opening and closing the valve. Therefore, operation necessary for closing the valve can be slowly performed, thus appropriately preventing dripping of a resist solution and occurrence of bubbles in a resist solution by air which enters from a forward end of a resist nozzle 60.

REFERENCES:
patent: 5127362 (1992-07-01), Iwatsu et al.
patent: 5134962 (1992-08-01), Amada et al.
patent: 5318271 (1994-06-01), Frisch
patent: 5636402 (1997-06-01), Kubo et al.
patent: 5665200 (1997-09-01), Fujimoto et al.

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