Coating thickness gauge using linearly polarized light

Details Coating thickness gauge using linearly polarized light Coating thickness gauge using linearly polarized light

1989-11-27

1992-12-08

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356369, G02F 101

Patent

active

051700492

ABSTRACT:
A coating thickness gauge for measuring the thickness of a coating of chromic oxideon a chromium layer on a substrate has a light source 17 for generating linearly polarized light, means 19 for splitting elliptically polarized light reflected through the chromic oxide coating into a plurality of beams 20, 21, detectors 22, 23 for intensity of each of the beams and means 24 for calculating the thickness of the coating of chromic oxide from the measured intensities. To simplify the device and the calculation, the splitting means are arranged to split the reflected elliptically polarized light into two partial beam 20, 21 polarized at a known angle relative to each other and the calculation means calculate the ellipticity from the measured intensity of the two partial beams and the thickness from the ellipticity.

REFERENCES:
patent: 3426201 (1969-02-01), Hilton et al.
patent: 3906844 (1975-08-01), Hall
patent: 3908508 (1975-08-01), Dubbeldam
patent: 4850711 (1989-07-01), Sano et al.
A. Torao, "Method for Measuring Thickness of Surface Film", Patent Abstracts of Japan, vol. 7, No. 109, (P-196) (1254), May. 1983.
M. Ishino, "Method for Analyzing Deflection of Thin Film", Patent Abstracts of Japan, vol. 9, No. 157, (P-369) (1880), Jul. 1985.

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