Stock material or miscellaneous articles – Structurally defined web or sheet – Including variation in thickness
Reexamination Certificate
2005-11-22
2005-11-22
Loney, Donald J. (Department: 1772)
Stock material or miscellaneous articles
Structurally defined web or sheet
Including variation in thickness
C428S120000, C428S167000, C428S172000, C359S321000, C359S566000, C430S322000
Reexamination Certificate
active
06967054
ABSTRACT:
A uniform coating is provided using surface features. Multiple ridges or other shapes are fabricated near an area of interest to allow for uniform coating in between the ridges. Areas at either ends of the ridges are left open to allow for excess pooling of photoresist liquid and to aid in obtaining uniform coating. The photoresist liquid or other coating fluid is applied to the sample and spun dry. A soft-bake process is performed to evaporate remaining solvents. An element, such as a diffractive, refractive, or reflective grating structure, is then formed in the area of interest using the uniform photoresist coating.
REFERENCES:
patent: 3783520 (1974-01-01), King
patent: 4815084 (1989-03-01), Scifres et al.
patent: 4903274 (1990-02-01), Taneya et al.
patent: 5351262 (1994-09-01), Poguntke et al.
Carter Duane E.
Evans Gary A.
Hilali Zuhair
Kirk Jay Bernard
Lee Darren S.
Loney Donald J.
Photodigm Inc.
Tkacs Stephen R.
Yee Duke W.
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