Coating solution for forming silica film

Details Coating solution for forming silica film Coating solution for forming silica film

2006-12-26

2006-12-26

Brunsman, David M. (Department: 1755)

Compositions: coating or plastic

Coating or plastic compositions

Silicon containing other than solely as silicon dioxide or...

C438S780000, C438S790000

Reexamination Certificate

active

07153355

ABSTRACT:
To provide a silica film-forming material having a low dielectric constant and giving a film of less undergoing change in aging, a coating solution for forming a silica film includes a hydrolysis product of a mixture comprising: a tetraalkoxysilane; and at least one of a monoalkyltrialkoxysilane and a dialkyldialkoxysilane, and an ammonium salt represented by formula (I):wherein R1represents an alkyl group having from 6 to 30 carbon atoms, R2represents an alkyl group having from 1 to 5 carbon atoms, and X represents CH3COO, SO3H or OH.

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Takamaro Kikkawa et al., Nikkei Microdevices, Feb. 2003 p. 123-132.
Taiwanese Office Action issued Jul. 27, 2006 (w/English Translation).

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