Coating solution for forming high dielectric constant thin...

Details Coating solution for forming high dielectric constant thin... Coating solution for forming high dielectric constant thin...

2011-04-19

2011-04-19

Brunsman, David M (Department: 1732)

Compositions

Electrically conductive or emissive compositions

Metal compound containing

C252S519200, C252S519300, C106S287190, C361S301300, C361S311000

Reexamination Certificate

active

07927517

ABSTRACT:
Disclosed herein are a coating solution for the formation of a dielectric thin film and a method for the formation of a dielectric thin film using the coating solution. The coating solution comprises a titanium alkoxide, a β-diketone or its derivative, and a benzoic acid derivative having an electron donating group. The method comprises spin coating the coating solution on a substrate to form a thin film and drying the thin film at a low temperature to crystallize the thin film. The titanium-containing coating solution is highly stable. In addition, the coating solution enables formation of a thin film, regardless of the kind of substrates, and can be used to form dielectric thin films in an in-line mode in the production processes of PCBs.

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