Coating solution for forming glassy layers

Details Coating solution for forming glassy layers Coating solution for forming glassy layers

1990-09-14

1994-04-12

Skaling, Linda

Compositions: coating or plastic

Coating or plastic compositions

Silicon containing other than solely as silicon dioxide or...

525477, 528 34, 528 38, 528 43, C09K 300, C08G 7700

Patent

active

053021983

ABSTRACT:
There is disclosed a method for producing a spin-on glass composition with a high carbon content for use as coating layers on substrates such as semiconductor silicon wafers. Also provided are spin-on glass compositions with polyorganosiloxanes having at least 30 wt.% carbon. These spin-on glass compositions show improved resistance to O.sub.2 concentration variations during etching and have an extended shelf-life of more than one year. Methods of using these spin-on glass compositions and semiconductor products produced therefrom are also provided.

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Morimoto et al., "Manufacturable and Reliable Spin-On-Glass Planarization for 1 .mu.m CMOS Double Layer Technology," 5th Int'l. VLSI Multilevel Interconnect Conference, Santa Clara, Calif., Jun. 13-15, 1988, pp. 411-415.

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