Coating processes – With post-treatment of coating or coating material – Heating or drying
Patent
1988-02-02
1989-06-27
Beck, Shrive
Coating processes
With post-treatment of coating or coating material
Heating or drying
4273881, 4273977, 427409, 1062871, B05D 302
Patent
active
048429015
ABSTRACT:
A coating solution for producing glassy layers on a substrate comprises a silicic acid ester, an aliphatic alcohol as a solvent, an acid in a catalytically active quantity, and water. The alcohol contains at least 4 carbon atoms and the acid has a pK.sub.a of less than +3. The viscosity of the coating solution is table even at elevated temperatures and the amount of water added is increased. The glassy layers produced from the coating solution exhibit no striations.
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H. Binder, et al., "The Influence of Striations in AZ 1350 H Photoresist Films on the Generation of Small Geometries," Colloque International sur la Microlithographie, Paris 21st-24th Jun., 1977 (Imprimerie E.M.F. 887-85-83) pp. 248-253.
English translation of WPI Abstract of German Offenlegungschrift No. 3,537,626.
Graf Werner
Merrem Hans-Joachim
Beck Shrive
Dang Vi Duong
Hoechst Aktiengesellschaft
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