Coating solution and method for preparing the coating solution,

Details Coating solution and method for preparing the coating solution, Coating solution and method for preparing the coating solution,

1998-03-17

1999-12-07

Marquis, Melvin I.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

524317, 524366, 524376, 528 10, 528 43, C08K 510

Patent

active

059985224

ABSTRACT:
A coating solution for forming an insulating film used in production of semiconductor devices includes siloxanes represented by a general formula:

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