Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to attribute – absence or presence of work
Reexamination Certificate
2006-02-27
2009-02-03
Koch, III, George R (Department: 1791)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to attribute, absence or presence of work
C118S684000, C118S699000, C118S702000, C118S712000, C118S713000
Reexamination Certificate
active
07485188
ABSTRACT:
A coating process method in which a coating liquid is discharged onto the surface of a target substrate to be processed while rotating the target substrate so as to expand the coating liquid radially outward on the target substrate and, thus, to form a coated film comprises the step of detecting that the actual discharging of a coating liquid from a coating liquid discharging nozzle is started, and the step of controlling based on a signal of the detection at least one of the driving timing of a pump for allowing the coating liquid to be discharged from the coating liquid discharging nozzle, the operation timing of a valve mounted to a pipe for supplying the coating liquid into the coating liquid discharging nozzle, and the rotation starting or stopping timing of the target substrate.
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Fukuda Yoshiteru
Kometani Yasuyuki
Minamida Junya
Takekuma Takashi
Koch, III George R
Rader & Fishman & Grauer, PLLC
Tokyo Electron Limited
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