Coating processes – Coating by vapor – gas – or smoke – Base includes an inorganic compound containing silicon or...
Patent
1992-04-17
1993-11-16
Beck, Shrive
Coating processes
Coating by vapor, gas, or smoke
Base includes an inorganic compound containing silicon or...
427244, 4272554, 4272557, 4273762, 427399, C23C 1600, B05D 500
Patent
active
052621995
ABSTRACT:
Metal organic chemical vapor deposition (MOCVD) is used to form a layer of a metal oxide on the surfaces and within the pores of a porous ceramic material. The metal oxide is formed from one or more inexpensive metal organic precursors which permeate the pores of the substrate as a vapor. Surface reactions on the heated substrate convert the metal organic precursors to their metal oxide. The technique has particular utility in creating catalysts with very large surface areas and in providing a protective coating on ceramic materials that prevents or reduces damage from hostile environments. In a preferred embodiment, aluminum isopropoxide, [(CH.sub.3).sub.2 CHO].sub.3 Al, and titanium ethoxide, Ti(C.sub.2 H.sub.5 O).sub.4, are used simultaneously or successively as precursors to generate a Al.sub.2 TiO.sub.5 coating on a porous ceramic substrate such as SiC or porous refractory cement candle filters.
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Desu Seshu
Peng Chien-Hsiung
Shi Tian
Beck Shrive
Center For Innovative Technology
Maiorana David M.
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